New device empowers IMP-EPD customers to refine Finish Level detection recipes with enhanced precision and effectivity.
EP-Replayer scan: Replay mode used to check and optimize a 3rd layer Finish Level. Picture Credit score: Hiden Analytical
Hiden Analytical pronounces the launch of the EP-Replayer, a strong new software program answer designed to streamline Finish Level recipe improvement and course of optimization for customers of Hiden’s IMP-EPD system.
The EP-Replayer allows customers to replay earlier etch knowledge in real-time, offering a exact, wafer-efficient approach to simulate, check, and refine Finish Level detection methods. By defining variables within the algorithmic recipe template, customers can visualize and optimize their Finish Level detection strategies with out consuming extra wafers—supporting a less expensive and dependable etch course of.
“With the EP-Replayer, we’re giving users a smarter way to build and test End Point detection recipes,” mentioned Matt Wilding, Senior Purposes Specialist at Hiden Analytical. “It’s all about reducing waste, improving repeatability, and accelerating development cycles without interrupting the live process.”
Key Options of the EP-Replayer:
Actual-time reprocessing of earlier etch knowledge to judge Finish Level detection efficiency.
Finish Level visualization and calculation through MASsoft software program.
Recipe optimization from a single etch, saving each time and materials.
Replay-based troubleshooting and algorithm refinement with out extra wafer runs.
Occasion logging and chart visualization, mirroring stay acquisition for intuitive comparability.
Possibility for impartial operation from the etch device, guaranteeing no disruption to ongoing manufacturing.
Designed for easy integration, the EP-Replayer simplifies MASsoft knowledge conversion into replay-ready information and permits direct recipe edits via a user-friendly interface. This mixture of flexibility and accuracy helps engineers cut back the danger of failed Finish Factors and scrapped wafers, whereas exploring extra superior algorithmic detection methods.
Whether or not optimizing a confirmed course of or creating new functions, the EP-Replayer allows engineers to get extra from each etch.
